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| Medium Current Icon Implanter |
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Medium Current is characterized by
low dose
(lower then 1.0E14/Cm2), low beam current(5uA~500uA) |
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Low Energy Extraction High Voltage;
20~40KeV.
90degrees Analyzer Magnet.
Accelerator.
Parallel Lens.
Energy Filter.
Electro Static Chuck.
360degrees Orientation and 60degrees
Tilt Wafer Handling System.
Sun Workstation; SPC and SECS/GEM with
UNIX Program. |
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